rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of compound semiconductors
    sub title: growth, processing, characterization, and devices
  name:
    name part: Holloway, Paul H.
  name:
    name part: McGuire, G. E.
  name:
    name part: Knovel (Firm)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  genre: Handbooks and manuals.
  origin info:
    place:
      place term: nju
    date issued: 1995
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xxii, 914 pages) : illustrations.
  abstract: This book reviews the advances and technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides an overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc.
  table of contents: Bulk Crystal Growth -- MOCVD of Compound Semiconductor Layers -- Molecular Beam Epitaxy -- Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials -- Surface Processing of III-V Semiconductors -- Ion Implantation Induced Extended Defects in GaAs -- Passivation of GaAs and InP -- Wet and Dry Etching of Compound Semiconductors -- Rapid Isothermal Processing (RIP) -- Epitaxial Lift-Off for Thin Film Compound Semiconductor Devices -- Packaging -- Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques -- Characterization of Compound Semiconductor Material by Ion Beams -- Optical Characterization of Compound Semiconductors -- Gallium Arsenide Microelectronic Devices and Circuits -- Optoelectronic Devices -- Acknowledgments -- References -- Index.
  note: edited by Paul H. Holloway, Gary E. McGuire.
  note: Electronic resource.
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references and index.
  subject:
    topic: Compound semiconductors
    genre: Handbooks, manuals, etc
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Solid State
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Semiconductors
  subject:
    topic: Compound semiconductors
  classification: QC611.8.C64 H65 1995eb
  classification: 621.3815/2
  related item:
    title info:
      title: Handbook of compound semiconductors
    origin info:
      publisher: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995
    identifier: (DLC) 95021540
  related item:
    title info:
      title: Materials science and process technology series
      part name: Electronic materials and process technology
  identifier: 9780815517443
  identifier: 0815517440
  identifier: 1591240808
  identifier: 9781591240808
  identifier: 9780080946146
  identifier: 0080946143
  identifier: 9780815513742
  identifier: 0815513747
  identifier: 153778:153938 Elsevier Science & Technology
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: KNOVL
    record creation date: 011127
    record change date: 20260609152727.6
    record identifier: in00003826300
    language of cataloging:
      language term: eng