rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of semiconductor wafer cleaning technology
    sub title: science, technology, and applications
  name:
    name part: Kern, Werner
    name part: 1925-
  name:
    name part: Knovel (Firm)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nju
    date issued: 1993
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xx, 623 pages) : illustrations.
  abstract: Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
  table of contents: 12. Ultratrace Impurity Analysis of Silicon Surfaces by SIMS and TXRF Methods / Richard S. Hockett -- 13. Future Directions / Werner Kern.
  note: edited by Werner Kern.
  note: Electronic resource.
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductor wafers
    topic: Cleaning
  subject:
    topic: Semiconductor wafers
    topic: Cleaning
  subject:
    topic: Semicondutores
  classification: TK7871.85 .H335 1993eb
  classification: 621.3815/2
  related item:
    title info:
      title: Handbook of semiconductor wafer cleaning technology
    origin info:
      publisher: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1993
    identifier: (DLC) 93004078
    identifier: (OCoLC)27976222
  related item:
    title info:
      title: Materials science and process technology series
      part name: Electronic materials and process technology
  identifier: 159124093X
  identifier: 9781591240938
  identifier: 9780815513315
  identifier: 0815513313
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: KNOVL
    record creation date: 011108
    record change date: 20260609152557.1
    record identifier: in00003826284
    language of cataloging:
      language term: eng