rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Materials science of thin films
    sub title: deposition and structure
  name:
    name part: Ohring, Milton
    name part: 1936-
    role:
      role term: creator
  name:
    name part: Knovel (Firm)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: cau
    date issued: 2002
    edition: 2nd ed.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xxi, 794 pages) : illustrations
  abstract: This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin Films. The knowledge base is intended for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films and scientists and engineers who are entering or require an overview of the field. Since 1992, when the book was first published, the field of thin films has expanded tremendously, especially with regard to technological applications. The second edition will bring the book up-to-date with regard to these advances. Most chapters have been greatly updated, and several new chapters have been added.
  table of contents: Foreword to First Edition -- Preface -- Acknowledgments -- A Historical Perspective -- Chapter 1 A Review of Materials Science -- 1.1. Introduction -- 1.2. Structure -- 1.3. Defects in Solids -- 1.4. Bonds and Bands in Materials -- 1.5. Thermodynamics of Materials -- 1.6. Kinetics -- 1.7. Nucleation -- 1.8. An Introduction to Mechanical Behavior -- 1.9. Conclusion -- Exercises -- References -- Chapter 2 Vacuum Science and Technology -- 2.1. Introduction -- 2.2. Kinetic Theory of Gases -- 2.3. Gas Transport and Pumping -- 2.4. Vacuum Pumps -- 2.5. Vacuum Systems -- 2.6. Conclusion -- Exercises -- References -- Chapter 3 Thin-Film Evaporation Processes -- 3.1. Introduction -- 3.2. The Physics and Chemistry of Evaporation -- 3.3. Film Thickness Uniformity and Purity -- 3.4. Evaporation Hardware -- 3.5. Evaporation Processes and Applications -- 3.6. Conclusion -- Exercises -- References -- Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions -- 4.1. Introduction -- 4.2. Plasmas, Discharges, and Arcs -- 4.3. Fundamentals of Plasma Physics -- 4.4. Reactions in Plasmas -- 4.5. Physics of Sputtering -- 4.6. Ion Bombardment Modification of Growing Films -- 4.7. Conclusion -- Exercises -- References -- Chapter 5 Plasma and Ion Beam Processing of Thin Films -- 5.1. Introduction -- 5.2. DC, AC, and Reactive Sputtering Processes -- 5.3. Magnetron Sputtering -- 5.4. Plasma Etching -- 5.5. Hybrid and Modified PVD Processes -- 5.6. Conclusion -- Exercises -- References -- Chapter 6 Chemical Vapor Deposition -- 6.1. Introduction -- 6.2. Reaction Types -- 6.3. Thermodynamics of CVD -- 6.4. Gas Transport -- 6.5. Film Growth Kinetics -- 6.6. Thermal CVD Processes -- 6.7. Plasma-Enhanced CVD Processes -- 6.8. Some CVD Materials Issues -- 6.9. Safety -- 6.10. Conclusion -- Exercises -- References -- Chapter 7 Substrate Surfaces and Thin-Film Nucleation -- 7.1. Introduction -- 7.2. An Atomic View of Substrate Surfaces -- 7.3. Thermodynamic Aspects of Nucleation -- 7.4. Kinetic Proc…
  table of contents: A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
  note: Milton Ohring.
  note: Electronic resource.
  note: Includes bibliographical references and index.
  subject:
    topic: Thin films
  subject:
    topic: Thin Films
  subject:
    topic: Couches minces
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Solid State
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Semiconductors
  subject:
    topic: Thin films
  subject:
    topic: Thin films
  classification: TA418.9.T45 O47 2002eb
  classification: 621.3815/2
  related item:
    title info:
      title: Materials science of thin films
    name:
      name part: Ohring, Milton, 1936-
    origin info:
      publisher: San Diego, CA : Academic Press, 2002
      edition: 2nd ed.
    identifier: (DLC) 2001089414
    identifier: (OCoLC)48463437
  identifier: 0585470979
  identifier: 9780585470979
  identifier: 9780080491783
  identifier: 0080491782
  identifier: 9780125249751
  identifier: 0125249756
  identifier: 2001089414
  identifier: 78783:78783 Elsevier Science & Technology
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OPELS
    record creation date: 070806
    record change date: 20260609152938.2
    record identifier: in00003805171
    language of cataloging:
      language term: eng