Cover Image

Integration of nanostructures into microsensor devices on whole wafers /

Bibliographic Details
Main Author:	Biaggi-Labiosa, Azlin M. (Author)
Format:	Government Document eBook
Language:	English
Published:	Cleveland, Ohio : National Aeronautics and Space Administration, Glenn Research Center, June 2015.
Series:	NASA technical memorandum ; 2015-218826.
Subjects:	Microinstrumentation. Microstructure. Nanostructures (devices) Nanowires. Sensors.
Online Access:	https://purl.fdlp.gov/GPO/gpo66956 http://purl.fdlp.gov/GPO/gpo66956

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