http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Integration of nanostructures into microsensor devices on whole wafers
1 online resource (14 pages) : color illustrations.
Azlin M. Biaggi-Labiosa [and three others].
Title from title screen (viewed on April 20, 2016).
Includes bibliographical references (pages 12-14).