Cover Image

Integration of nanostructures into microsensor devices on whole wafers /

Bibliographic Details
Main Author: Biaggi-Labiosa, Azlin M. (Author)
Format: Government Document eBook
Language:English
Published: Cleveland, Ohio : National Aeronautics and Space Administration, Glenn Research Center, June 2015.
Series:NASA technical memorandum ; 2015-218826.
Subjects:
Microinstrumentation.
Microstructure.
Nanostructures (devices)
Nanowires.
Sensors.
Online Access:https://purl.fdlp.gov/GPO/gpo66956
http://purl.fdlp.gov/GPO/gpo66956
Description
Item Description:Title from title screen (viewed on April 20, 2016).
"June 2015."
Physical Description:1 online resource (14 pages) : color illustrations.
Bibliography:Includes bibliographical references (pages 12-14).