3D IC devices, technologies, and manufacturing /
This book discusses the advantages of 3D devices and their applications in dynamic random access memory (DRAM), 3D-NAND flash, and advanced-technology-node CMOS ICs. Topics include the development of DRAM cell transistors and storage node capacitors; the manufacturing process of advanced buried-word...
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| Format: | Book |
| Language: | English |
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Bellingham, Washington, USA :
SPIE Press,
[2016]
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