Optical scattering : measurement and analysis /
As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentat...
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| Format: | eBook |
| Language: | English |
| Published: |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
[1995]
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| Edition: | 2nd ed. |
| Series: | SPIE monograph ;
PM24. |
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. |
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| Item Description: | "SPIE digital library." Electronic resource. |
| Physical Description: | 1 online resource (xiii, 321 pages) : illustrations. Also available in print version. |
| Format: | Mode of access: World Wide Web. System requirements: Adobe Acrobat Reader. |
| Bibliography: | Includes bibliographical references (pages 303-317) and index. |
| ISBN: | 9780819478443 (electronic) |
| DOI: | 10.1117/3.203079 |
| Access: | Restricted to subscribers or individual electronic text purchasers. |