Growth and transport in nanostructured materials : reactive transport in PVD, CVD, and ALD /
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| Format: | eBook |
| Language: | English |
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Cham, Switzerland :
Springer,
[2017]
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| Series: | SpringerBriefs in materials.
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Introduction
- Fundamentals of Gas Phase Transport on Nanostructured Materials
- Modeling Thin Film Growth on Nanostructured Materials
- Advanced Concepts.