Growth and transport in nanostructured materials : reactive transport in PVD, CVD, and ALD /
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| Format: | eBook |
| Language: | English |
| Published: |
Cham, Switzerland :
Springer,
[2017]
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| Series: | SpringerBriefs in materials.
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9783319246727 3319246720 |