APA (7th ed.) Citation

Lin, B. J. (2010). Optical lithography: Here is why. SPIE. https://doi.org/10.1117/3.821000

Chicago Style (17th ed.) Citation

Lin, Burn Jeng. Optical Lithography: Here Is Why. Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA): SPIE, 2010. https://doi.org/10.1117/3.821000.

MLA (9th ed.) Citation

Lin, Burn Jeng. Optical Lithography: Here Is Why. SPIE, 2010. https://doi.org/10.1117/3.821000.