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Optical imaging in projection microlithography /

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Bibliographic Details
Main Author: Wong, Alfred Kwok-Kit
Corporate Author: Society of Photo-optical Instrumentation Engineers
Format: eBook
Language:English
Published: Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, [2005]
Series:SPIE tutorial texts ; TT66.
Subjects:
Imaging systems.
Microlithography.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • 1. Basic electromagnetism. 1.1. Maxwell's equations
  • 1.2. Electromagnetic energy
  • 1.3. The wave equation
  • 1.4. Plane waves
  • 1.5. Spherical waves
  • 1.6. Harmonic waves
  • 1.7. Quasi-monochromatic light.
  • 2. Elements of geometrical optics. 2.1. The eikonal equation
  • 2.2. Light rays
  • 2.3. Snell's law
  • 2.4. Thin lens
  • 2.5. Representation of an exposure system.
  • 3. Elements of diffraction theory. 3.1. Qualitative consideration
  • 3.2. Reciprocity
  • 3.3. The Helmholtz-Kirchhoff theorem
  • 3.4. Fresnel-Kirchhoff diffraction
  • 3.5. The Rayleigh-Sommerfeld diffraction formula
  • 3.6. Fraunhofer diffraction
  • 3.7. Fraunhofer diffraction patterns.
  • 4. Imaging of extended objects with finite sources. 4.1. Coherent illumination
  • 4.2. Obliquity factor
  • 4.3. Spatial correlation of light
  • 4.4. Köhler's illumination method
  • 4.5. Partially coherent imaging.
  • 5. Resolution and image enhancement. 5.1. Image intensity spectrum
  • 5.2. Binary intensity objects under on-axis illumination
  • 5.3. Off-axis illumination
  • 5.4. Attenuated phase-shifting mask
  • 5.5. Alternating phase-shifting mask
  • 5.6. Minimum half-pitch
  • 5.7. Minimum dimension.
  • 6. Oblique rays. 6.1. Polarization
  • 6.2. Vector imaging
  • 6.3. Wave propagation across a dielectric interface
  • 6.4. Stratified media
  • 6.5. Intensity distribution in photoresist
  • 6.6. Immersion imaging
  • 6.7. Imaging with oblique rays.
  • 7. Aberrations. 7.1. Diffraction of an aberrated wavefront
  • 7.2. General properties of the aberration function
  • 7.3. Zernike polynomials
  • 7.4. Effects on imaging
  • 7.5. Measurement.
  • 8. Numerical computation. 8.1. Imaging equations
  • 8.2. Transmission cross-coefficient integration
  • 8.3. Source points integration
  • 8.4. Coherent decomposition
  • 8.5. Object spectrum
  • 8.6. Remarks.
  • 9 Variabilities. 9.1. Categorization
  • 9.2. Proximity effect
  • 9.3. Object variabilities (photomask errors)
  • 9.4. Polarization effects
  • 9.5. Illumination
  • 9.6. Pupil
  • 9.7. Focus
  • 9.8. Dose
  • 9.9. Flare
  • 9.10. Remarks.
  • A. Birefringence
  • B. Stationarity and ergodicity
  • C. Some Zernike polynomials
  • D. Simulator accuracy tests
  • E. Select refractive indexes
  • F. Assorted theorems and identities
  • Bibliography
  • Solutions to exercises
  • Index.