APA (7th ed.) Citation

Wong, A. K. (2005). Optical imaging in projection microlithography. SPIE. https://doi.org/10.1117/3.612961

Chicago Style (17th ed.) Citation

Wong, Alfred Kwok-Kit. Optical Imaging in Projection Microlithography. Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA): SPIE, 2005. https://doi.org/10.1117/3.612961.

MLA (9th ed.) Citation

Wong, Alfred Kwok-Kit. Optical Imaging in Projection Microlithography. SPIE, 2005. https://doi.org/10.1117/3.612961.

Warning: These citations may not always be 100% accurate.