rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Molecular theory of lithography
  name:
    name part: Okoroanyanwu, Uzodinma
    role:
      role term: creator
    role:
      role term: author.
  name:
    name part: SPIE (Society)
    role:
      role term: issuing body.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: wau
    date issued: 2015
    copyright date: 2015
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xxii, 465 pages : illustrations ; 26 cm
  abstract: This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithographic process, as well as for advanced lithographic imaging mechanisms, including photochemical and radiochemical, imprint, and directed block copolymer self-assembly imaging mechanisms. The book is intended for student and professionals whose knowledge of lithography extends to the chemistry and physics underlying its various forms. A familiarity with chemical kinetics, thermodynamics, statistical mechanics, and quantum mechanics will be helpful, as will be familiarity with elementary concepts in physics such as energy, force, electrostatics, electrodynamics, and optics.
  table of contents: Preface -- Acronyms and abbreviations -- Overview of lithography -- Theory of the lithographic process -- Theory of molecular interactions in lithography -- Theory of photochemical and radiochemical lithographic imaging mechanisms -- Theory of block copolymer self-assembly lithographic imaging mechanisms -- Theory of imprint lithographic imaging mechanisms.
  note: by Uzodinma Okoroanyanwu.
  note: Includes bibliographical references and index.
  subject:
    topic: Microlithography
    topic: Industrial applications
  subject:
    topic: Molecular theory
  subject:
    topic: Molecular electronics
  subject:
    topic: Integrated circuits
    topic: Masks
  subject:
    topic: Integrated circuits
    topic: Masks
  subject:
    topic: Microlithography
    topic: Industrial applications
  subject:
    topic: Molecular electronics
  subject:
    topic: Molecular theory
  classification: TK7872.M3 O48 2015
  classification: 621.3815/31
  identifier: 9781628415513
  identifier: 1628415517
  identifier: 2014043296
  record info:
    record content source: DLC
    record creation date: 141202
    record change date: 20170928111450.0
    record identifier: in00003615019
    language of cataloging:
      language term: eng