A study on reactive ion etching of barium strontium titanate films using mixtures of argon (Ar), carbon tetrafluoride (CF4), and sulfur hexafluoride (SF6) /
| Main Author: | |
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| Format: | Government Document eBook |
| Language: | English |
| Published: |
Aberdeen Proving Ground, MD :
Army Research Laboratory,
July 2014.
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| Series: | ARL-TR (Aberdeen Proving Ground, Md.) ;
6979. |
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo61146 http://purl.fdlp.gov/GPO/gpo61146 |
| Item Description: | Title from title screen (viewed Sept. 29, 2015). "July 2014." |
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| Physical Description: | 1 online resource (iv, 7 pages) : illustrations. |
| Bibliography: | Includes bibliographical references. |