APA (7th ed.) Citation

Hirsch, S. G. (2014). A study on reactive ion etching of barium strontium titanate films using mixtures of argon (Ar), carbon tetrafluoride (CF4), and sulfur hexafluoride (SF6). Army Research Laboratory.

Chicago Style (17th ed.) Citation

Hirsch, Samuel G. A Study on Reactive Ion Etching of Barium Strontium Titanate Films Using Mixtures of Argon (Ar), Carbon Tetrafluoride (CF4), and Sulfur Hexafluoride (SF6). Aberdeen Proving Ground, MD: Army Research Laboratory, 2014.

MLA (9th ed.) Citation

Hirsch, Samuel G. A Study on Reactive Ion Etching of Barium Strontium Titanate Films Using Mixtures of Argon (Ar), Carbon Tetrafluoride (CF4), and Sulfur Hexafluoride (SF6). Army Research Laboratory, 2014.