Laser-Assisted Microtechnology /
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
1994.
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| Edition: | Second, Updated edition. |
| Series: | Springer series in materials science ;
19. |
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| Online Access: | Connect to the full text of this electronic book |
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