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Laser-Assisted Microtechnology /

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Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph...

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Bibliographic Details
Main Author: Metev, Simeon M.
Corporate Author: SpringerLink (Online service)
Other Authors: Veiko, Vadim P.
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1994.
Edition:Second, Updated edition.
Series:Springer series in materials science ; 19.
Subjects:
Engineering.
Computer engineering.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
Item Description:Electronic resource.
Physical Description:1 online resource (x, 240 pages 98 illustrations)
ISBN:9783642973277 (electronic bk.)
3642973272 (electronic bk.)
ISSN:0933-033X ;