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Technology of Integrated Circuits /

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Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials, modern planar technology, process designs for CMOS, Bipolar, BICMOS and smar...

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Bibliographic Details
Main Author: Widmann, D. (Dietrich)
Corporate Author: SpringerLink (Online service)
Other Authors: Mader, Hermann, Friedrich, H. (Hans), Heywang, Walter, Müller, Rudolf
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2000.
Series:Springer series in advanced microelectronics ; 2.
Subjects:
Engineering.
Chemical engineering.
Electronics.
Optical materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Introduction
  • Basic Principles of Integrated Circuit Technology
  • Film Technology
  • Lithography
  • Etching Technology
  • Doping Technology
  • Cleaning Technology
  • Process Integration.