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Technology of Integrated Circuits /

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Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials, modern planar technology, process designs for CMOS, Bipolar, BICMOS and smar...

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Bibliographic Details
Main Author: Widmann, D. (Dietrich)
Corporate Author: SpringerLink (Online service)
Other Authors: Mader, Hermann, Friedrich, H. (Hans), Heywang, Walter, Müller, Rudolf
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2000.
Series:Springer series in advanced microelectronics ; 2.
Subjects:
Engineering.
Chemical engineering.
Electronics.
Optical materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials, modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.
Item Description:Electronic resource.
Physical Description:1 online resource (xviii, 340 pages)
ISBN:9783662041604 (electronic bk.)
366204160X (electronic bk.)
ISSN:1437-0387 ;