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Modelling of Microfabrication Systems /

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This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of...

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Bibliographic Details
Main Author: Nassar, Raja
Corporate Author: SpringerLink (Online service)
Other Authors: Dai, Weizhong
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2003.
Series:Microtechnology and MEMS.
Subjects:
Engineering.
Numerical analysis.
Electronics.
Nanotechnology.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Ion Beam
  • X-ray Lithography
  • Laser Chemical Vapor Deposition
  • Laser Photopolymerization
  • Laser Photoablation
  • Thin Films.