rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    non sort: An
    title: Introduction to Surface-Micromachining
  name:
    name part: Johnstone, Robert W.
    role:
      role term: creator
  name:
    name part: Parameswaran, Ash M.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: mau
    date issued: 2004
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (xiii, 189 pages)
  abstract: An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
  note: by Robert W. Johnstone, M. Parameswaran.
  note: Electronic resource.
  subject:
    topic: Engineering
  subject:
    topic: Mechanical engineering
  subject:
    topic: Computer engineering
  subject:
    topic: Systems engineering
  subject:
    topic: Computer engineering
  subject:
    topic: Engineering
  subject:
    topic: Mechanical engineering
  subject:
    topic: Systems engineering
  classification: TK7888.4
  classification: 621.3815
  identifier: 9781402080210 (electronic bk.)
  identifier: 1402080212 (electronic bk.)
  identifier: 9781475710779
  identifier: 1475710771
  identifier: 1402080212
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: AU@
    record creation date: 121227
    record change date: 20260420213044.8
    record identifier: in00003577273
    language of cataloging:
      language term: eng