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Micro System Technologies 90 : 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990 /

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Bibliographic Details
Main Author: Reichl, H. (Herbert)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1990.
Subjects:
Engineering.
Electronics.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Simulation and Design: Design of Micro Systems
  • CAD of Optical Devices
  • Simulation and Design
  • Electrical and Thermal Properties
  • Simulation and Design of Sensors
  • Measurement and Testing: Testing
  • Material Characterization
  • Physical Properties; Semiconductor Characteristics; Optical Methods
  • Materials: Materials for Packaging and Passivation
  • Integrated Optics Materials and Technologies
  • Technologies: Pattern Generation and Image Transfer
  • Laser Supported Deposition
  • Reactive Etching and Deposition
  • Contact Methods
  • Packaging
  • Optical Assembly and Interconnection Technologies
  • Sensor and Actuator Technologies
  • Basic Components and Applications: Sensors for Physical Parameters
  • Gas and Ionic Sensors
  • Sensors for Biological and Medical Application
  • Optical Sensors. Optical Components
  • Actuators
  • Author Index.