Micro System Technologies 90 : 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10-13 September 1990 /
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
1990.
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource (xv, 858 pages 642 illustrations) |
| ISBN: | 9783642456787 (electronic bk.) 3642456782 (electronic bk.) |