Silicon Nitride for Microelectronic Applications : Part 1 Preparation and Properties /
| Main Author: | Milek, John T. |
|---|---|
| Corporate Author: | SpringerLink (Online service) |
| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer US,
1971.
|
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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