Silicon Nitride for Microelectronic Applications : Part 1 Preparation and Properties /

Bibliographic Details

Main Author:	Milek, John T.
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 1971.
Subjects:	Engineering. Computer engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book