Milek, J. T. (1971). Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties. Springer US.
Chicago Style (17th ed.) CitationMilek, John T. Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties. Boston, MA: Springer US, 1971.
MLA (9th ed.) CitationMilek, John T. Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties. Springer US, 1971.
Warning: These citations may not always be 100% accurate.