Physical Chemistry of, in and on Silicon /

This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for...

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Bibliographic Details
Main Author:	Cerofolini, Gianfranco
Corporate Author:	SpringerLink (Online service)
Other Authors:	Meda, Laura
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 1989.
Series:	Springer series in materials science ; 8.
Subjects:	Physical organic chemistry. Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents:

Silicon
Silicon Phases
Equilibrium Defects
Impurities
Dopants
Defect-Impurity Interactions
The High Density Limit
Surfaces and Interfaces
Gettering
Device Processing
References
Acronyms and Abbreviations
Subject Index.