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Physical Chemistry of, in and on Silicon /

This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for...

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Bibliographic Details
Main Author: Cerofolini, Gianfranco
Corporate Author: SpringerLink (Online service)
Other Authors: Meda, Laura
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1989.
Series:Springer series in materials science ; 8.
Subjects:
Physical organic chemistry.
Optical materials.
Surfaces (Physics)
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acceptor structure, and detailed information is included on gettering techniques. Silicon processing for device manufacture is briefly discussed.
Item Description:Electronic resource.
Physical Description:1 online resource (viii, 122 pages 26 illustrations)
ISBN:9783642735042 (electronic bk.)
3642735045 (electronic bk.)
ISSN:0933-033X ;