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Introduction to VLSI Process Engineering.

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

Bibliographic Details
Corporate Authors: Kagaku Kōgakkai (Japan), SpringerLink (Online service)
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands, 1993.
Subjects:
Engineering.
Biotechnology.
Machinery.
Optical materials.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.
Item Description:Electronic resource.
Physical Description:1 online resource (xiii, 210 pages)
ISBN:9789401115629 (electronic bk.)
9401115621 (electronic bk.)