APA (7th ed.) Citation

Kagaku Kōgakkai (Japan) & SpringerLink (Online service). (1993). Introduction to VLSI Process Engineering. Springer Netherlands.

Chicago Style (17th ed.) Citation

Kagaku Kōgakkai (Japan) and SpringerLink (Online service). Introduction to VLSI Process Engineering. Dordrecht: Springer Netherlands, 1993.

MLA (9th ed.) Citation

Kagaku Kōgakkai (Japan) and SpringerLink (Online service). Introduction to VLSI Process Engineering. Springer Netherlands, 1993.

Warning: These citations may not always be 100% accurate.