Ion Implantation in Semiconductors : Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany /
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
1971.
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| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | 1 online resource. |
| ISBN: | 9783642806605 (electronic bk.) 3642806600 (electronic bk.) |