Ion Implantation in Semiconductors : Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany /

Bibliographic Details
Main Author: Ruge, Ingolf
Corporate Author: SpringerLink (Online service)
Other Authors: Graul, Jürgen
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1971.
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource.
ISBN:9783642806605 (electronic bk.)
3642806600 (electronic bk.)