Ruge, I., & Graul, J. (1971). Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany. Springer Berlin Heidelberg.
Chicago Style (17th ed.) CitationRuge, Ingolf, and Jürgen Graul. Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany. Berlin, Heidelberg: Springer Berlin Heidelberg, 1971.
MLA (9th ed.) CitationRuge, Ingolf, and Jürgen Graul. Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany. Springer Berlin Heidelberg, 1971.