rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microscale Heat Conduction in Integrated Circuits and Their Constituent Films
  name:
    name part: Ju, Y. Sungtaek.
    role:
      role term: creator
  name:
    name part: Goodson, Kenneth E.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: mau
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (xxi, 102 pages)
  abstract: The study of thermal phenomena in microdevices has attracted significant attention recently. The interdisciplinary nature of this topic, however, makes it very difficult for researchers to fully understand details of research results presented in journal articles. For many researchers intending to be active in this field, therefore, a more comprehensive treatment, complete with sufficient background information, is urgently needed. Advances in semiconductor device technology render the thermal characterization and design of ICs increasingly more important. The present book discusses experimental and theoretical studies of heat transfer in transistors and interconnects. A novel optical thermometry technique captures temperature fields with high temporal and spatial failures in devices that are subjected to electrical overstress (EOS) and electrostatic discharge (ESD). Also reported are techniques for determining the thermal transport properties of dielectric passivation layers and ultra-thin silicon-on-insulator (SOI) layers. Theoretical analysis on the data yields insight into the dependence of thermal properties on film processing conditions. The techniques and data presented here will greatly aid the thermal engineering of interconnects and transistors.
  note: by Y. Sungtaek Ju, Kenneth E. Goodson.
  note: Electronic resource.
  subject:
    topic: Engineering
  subject:
    topic: Mechanics
  subject:
    topic: Computer engineering
  subject:
    topic: Optical materials
  subject:
    topic: Computer engineering
  subject:
    topic: Engineering
  subject:
    topic: Mechanics
  subject:
    topic: Optical materials
  classification: TK1-9971
  classification: 621.3
  related item:
    title info:
      title: Microsystems ; 6
  identifier: 9781461552116 (electronic bk.)
  identifier: 1461552117 (electronic bk.)
  identifier: 9781461373742
  identifier: 1461373743
  identifier: 1461552117
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: AU@
    record creation date: 121227
    record change date: 20260422221751.8
    record identifier: in00003568643
    language of cataloging:
      language term: eng