Epitaxy : Physical Principles and Technical Implementation /

Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline subst...

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Bibliographic Details
Main Author: Herman, Marian A.
Corporate Author: SpringerLink (Online service)
Other Authors: Richter, Wolfgang, Sitter, Helmut
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2004.
Series:Springer series in materials science ; 62.
Subjects:
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Introduction
  • Homo- and Heteroepitaxial Crystallization Phenomena
  • Application Areas of Epitaxially Grown Layer Structures
  • Solid Phase Epitaxy
  • Liquid Phase Epitaxy
  • Vapour Phase Epitaxy
  • Molecular Beam Epitaxy
  • Metal Organic Vapour Phase Epitaxy
  • In-situ Analysis of Species and Transport
  • In-situ Surface Analysis
  • Thermodynamic Aspects
  • Atomic Aspects
  • Quantum Mechanical Aspects
  • Heteroepitaxy: Growth Phenomena
  • Material-Related Problems of Heteroepitaxy
  • Closing Remarks.