APA (7th ed.) Citation

Herman, M. A., Richter, W., & Sitter, H. (2004). Epitaxy: Physical Principles and Technical Implementation. Springer Berlin Heidelberg.

Chicago Style (17th ed.) Citation

Herman, Marian A., Wolfgang Richter, and Helmut Sitter. Epitaxy: Physical Principles and Technical Implementation. Berlin, Heidelberg: Springer Berlin Heidelberg, 2004.

MLA (9th ed.) Citation

Herman, Marian A., et al. Epitaxy: Physical Principles and Technical Implementation. Springer Berlin Heidelberg, 2004.