Shape Memory Microactuators /
Since the beginning of the nineties, shape memory alloys (SMA) have become available for microsystems technology. Currently the breadth of research and development activities on SMA microactuators ranges from pure scientific topics of materials research to technological problems, such as micromachin...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
2004.
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| Series: | Microtechnology and MEMS.
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Introduction and Overview
- Microactuators
- Shape Memory Effects
- Shape Memory Actuation
- SMA Microvalves
- SMA Linear Actuators.