Advanced technologies based on wave and beam generated plasmas /
This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It encompasses all the links in the progress from fundamentals to applications: the description...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer,
1999.
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| Series: | NATO ASI series. High technology ;
vol. 67. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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Published 1999
Conference Proceeding
Book