Advanced technologies based on wave and beam generated plasmas /
This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It encompasses all the links in the progress from fundamentals to applications: the description...
| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer,
1999.
|
| Series: | NATO ASI series. High technology ;
vol. 67. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Similar Items
Advanced technologies based on wave and beam generated plasmas /
Published: (1999)
Published: (1999)
Plasma electronics : applications in microelectronic device fabrication /
by: Makabe, T. (Toshiaki), et al.
Published: (2014)
by: Makabe, T. (Toshiaki), et al.
Published: (2014)
Nonthermal plasmas for materials processing /
by: Friedrich, J̲rg Florian, et al.
Published: (2022)
by: Friedrich, J̲rg Florian, et al.
Published: (2022)
Laser-induced plasmas and applications /
Published: (1989)
Published: (1989)
Plasma Engineering /
by: Keidar, Michael, et al.
Published: (2018)
by: Keidar, Michael, et al.
Published: (2018)
Plasma Engineering : Applications from Aerospace to Bio and Nanotechnology.
by: Keidar, Michael
Published: (2013)
by: Keidar, Michael
Published: (2013)
Atomic physics for hot plasmas /
by: Shevel'ko, V. P. (Vi︠a︡cheslav, Petrovich)
Published: (1993)
by: Shevel'ko, V. P. (Vi︠a︡cheslav, Petrovich)
Published: (1993)
Plasma processing of semiconductors /
Published: (1997)
Published: (1997)
Plasma electronics : applications in microelectronic device fabrication /
by: Makabe, T. (Toshiaki), et al.
Published: (2026)
by: Makabe, T. (Toshiaki), et al.
Published: (2026)
Lecture notes on principles of plasma processing /
by: Chen, Francis F., 1929-
Published: (2003)
by: Chen, Francis F., 1929-
Published: (2003)
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
Published: (1990)
Published: (1990)
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
Published: (1990)
Published: (1990)
Dusty plasmas : physics, chemistry and technological impacts in plasma processing /
Published: (1999)
Published: (1999)
Industrial plasma technology : applications from environmental to energy technologies /
Published: (2010)
Published: (2010)
Industrial plasma technology : applications from environmental to energy technologies /
Published: (2010)
Published: (2010)
Advanced plasma technology /
Published: (2008)
Published: (2008)
Handbook of advanced plasma processing techniques /
Published: (2000)
Published: (2000)
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
Published: (1990)
Published: (1990)
Plasma deposition of polymeric thin films : proceedings of the American Chemical Society Symposium on Plasma Deposition of Polymeric Thin Films: Chemisty, Characterization, and Applications, held in Denver, Colorado, March 28-29, 1993 /
Published: (1994)
Published: (1994)
Low-temperature plasma chemical engineering
Published: (2025)
Published: (2025)
Cold plasma in materials fabrication : from fundamentals to applications /
by: Grill, Alfred
Published: (1994)
by: Grill, Alfred
Published: (1994)
Plasma processes and plasma kinetics : 586 worked out problems for science and technology /
by: Smirnov, B. M. (Boris Mikhaĭlovich), 1938-
Published: (2007)
by: Smirnov, B. M. (Boris Mikhaĭlovich), 1938-
Published: (2007)
Plasma processes and plasma kinetics : 586 worked out problems for science and technology /
by: Smirnov, B. M. (Boris Mikhaĭlovich), 1938-
Published: (2007)
by: Smirnov, B. M. (Boris Mikhaĭlovich), 1938-
Published: (2007)
Principles of plasma discharges and materials processing /
by: Lieberman, M. A. (Michael A.)
Published: (1994)
by: Lieberman, M. A. (Michael A.)
Published: (1994)
Plasma etching processes for CMOS device realization /
Published: (2017)
Published: (2017)
Physics of radio-frequency plasmas /
by: Chabert, Pascal, 1969-
Published: (2011)
by: Chabert, Pascal, 1969-
Published: (2011)
ENERGY FROM PLASMA : production and storage.
Published: (2025)
Published: (2025)
IEEE conference record-abstracts : the First International Conference on Plasma Science, May 15-17, 1974, the University of Tennessee, Knoxville, Tenn. /
Published: (1975)
Published: (1975)
Plasma etching : an introduction /
Published: (1989)
Published: (1989)
Plasma processing of nanomaterials /
Published: (2012)
Published: (2012)
Dry etching technology for semiconductors /
by: Nojiri, Kazuo
Published: (2015)
by: Nojiri, Kazuo
Published: (2015)
Fabrication of nanostructures by plasma electrolysis /
by: Aliofkhazraei, Mahmood
Published: (2010)
by: Aliofkhazraei, Mahmood
Published: (2010)
High density plasma sources : design, physics, and performance /
Published: (1995)
Published: (1995)
Kinetics of nonequilibrium low-temperature plasmas /
by: Biberman, L. M. (Leon Mikhaĭlovich)
Published: (1987)
by: Biberman, L. M. (Leon Mikhaĭlovich)
Published: (1987)
Radiative and collisional characteristics of ions in hot plasmas /
by: Sobelʹman, I. I. (Igorʹ Ilʹich), 1927-2005
Published: (1993)
by: Sobelʹman, I. I. (Igorʹ Ilʹich), 1927-2005
Published: (1993)
Nuclear matter in different phases and transitions : proceedings of the workshop Nuclear Matter in Different Phases and Transitions, March 31-April 10, 1998, Les Houches, France /
Published: (1999)
Published: (1999)