Advanced technologies based on wave and beam generated plasmas /
This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It encompasses all the links in the progress from fundamentals to applications: the description...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer,
1999.
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| Series: | NATO ASI series. High technology ;
vol. 67. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It encompasses all the links in the progress from fundamentals to applications: the description and modelling of different plasma sources to technological use; from general diagnostics to methods related to technological control and operation of plasma reactors. The book lays a foundation for the application of sources in industry (in high-tech electronics, microelectronics, IC fabrication, plasma chemistry, lighting, new materials, optics, the biomedical industry, aerospace, etc.), and in astrophysics, atomic physics, laser physics, accelerator physics and microwave devices. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xiii, 569 pages) |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 9789401706339 (electronic bk.) 9401706336 (electronic bk.) |