rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Micromachined Ultrasound-Based Proximity Sensors
  name:
    name part: Hornung, Mark R.
    role:
      role term: creator
  name:
    name part: Brand, Oliver.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: mau
    date issued: 1999
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (xiii, 121 pages)
  abstract: Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity. Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences. The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements. The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm. Micromachined Ultrasound-Based Proximity Sensors will be of interest to MEMS researchers as well as those involved in solid-state sensor development.
  note: by Mark R. Hornung, Oliver Brand.
  note: Electronic resource.
  subject:
    topic: Engineering
  subject:
    topic: Computer engineering
  subject:
    topic: Optical materials
  subject:
    topic: Computer engineering
  subject:
    topic: Engineering
  subject:
    topic: Optical materials
  classification: TK1-9971
  classification: 621.3
  related item:
    title info:
      title: Microsystems ; 4
  identifier: 9781461549970 (electronic bk.)
  identifier: 1461549973 (electronic bk.)
  identifier: 9781461372691
  identifier: 1461372690
  identifier: 1461549973
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: AU@
    record creation date: 121227
    record change date: 20260422220650.0
    record identifier: in00003564584
    language of cataloging:
      language term: eng