El-Kareh, B. (1995). Fundamentals of Semiconductor Processing Technology. Springer US.
Chicago Style (17th ed.) CitationEl-Kareh, Badih. Fundamentals of Semiconductor Processing Technology. Boston, MA: Springer US, 1995.
MLA (9th ed.) CitationEl-Kareh, Badih. Fundamentals of Semiconductor Processing Technology. Springer US, 1995.
Warning: These citations may not always be 100% accurate.