Ion Implantation in Semiconductors and Other Materials /

Bibliographic Details
Main Author: Crowder, Billy L.
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Boston, MA : Springer US, 1973.
Series:IBM research symposia series.
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:1 online resource (volumes)
ISBN:9781468420647 (electronic bk.)
146842064X (electronic bk.)