Laser-Assisted Microtechnology /

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical ph...

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Bibliographic Details
Main Author: Metev, Simeon M.
Corporate Author: SpringerLink (Online service)
Other Authors: Veiko, Vadim P.
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1998.
Edition:Second, Updated edition.
Series:Springer series in materials science ; 19.
Subjects:
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by Metev, Simeon M.
Published 1994
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