Theory and application of laser chemical vapor deposition /
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemi...
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| Format: | eBook |
| Language: | English |
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New York :
Plenum Press,
[1995]
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| Series: | Lasers, photonics, and electro-optics.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system. |
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| Physical Description: | 1 online resource (xii, 395 pages) : illustrations. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781489914309 (electronic bk.) 1489914307 (electronic bk.) |