APA (7th ed.) Citation

Hattori, T. (1998). Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing. Springer Berlin Heidelberg.

Chicago Style (17th ed.) Citation

Hattori, Takeshi. Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing. Berlin, Heidelberg: Springer Berlin Heidelberg, 1998.

MLA (9th ed.) Citation

Hattori, Takeshi. Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing. Springer Berlin Heidelberg, 1998.