rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon
  name:
    name part: Pichler, P. (Peter)
    role:
      role term: creator
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: au
    date issued: 2004
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (xxi, 554 pages)
  abstract: Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of the properties of intrinsic point defects, acceptor and donor impurities, isovalent atoms, chalcogens, and halogens in silicon, as well as of their complexes. Special emphasis is placed on compiling the structures, energetic properties, identified electrical levels and spectroscopic signatures, and the diffusion behavior from experimental and theoretical investigations. In addition, the book discusses the fundamental concepts of silicon and its defects, the electron system, diffusion, thermodynamics, and reaction kinetics which form the scientific basis needed for a thorough understanding of the text. Therefore, the book is able to provide an introduction to newcomers in this field up to a comprehensive reference for experts in process technology, solid-state physics, and simulation of semiconductor processes.
  table of contents: Preface -- Frequently Used Symbols -- Explanation of Frequently Used Abbreviations -- Fundamental Concepts -- Intrinsic Point Defects -- Impurity Diffusion in Silicon -- Isovalent Impurities -- Dopants -- Chalcogens -- Halogens -- List of Tables -- List of Figures -- Index.
  note: by Peter Pichler.
  note: Electronic resource.
  subject:
    topic: Engineering
  subject:
    topic: Electronics
  subject:
    topic: Optical materials
  subject:
    topic: Electronics
  subject:
    topic: Engineering
  subject:
    topic: Optical materials
  classification: TK7800-8360
  classification: TK7874-7874.9
  classification: 621.381
  related item:
    title info:
      title: Computational microelectronics
  identifier: 9783709105979 (electronic bk.)
  identifier: 3709105978 (electronic bk.)
  identifier: 9783709172049
  identifier: 3709172047
  identifier: 3709105978
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: AU@
    record creation date: 121227
    record change date: 20260420203951.4
    record identifier: in00003557661
    language of cataloging:
      language term: eng