rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Physical and Technical Problems of SOI Structures and Devices
  title info:
    title: Proceedings of the NATO Advanced Research Workshop, Gurzuf, Ukraine, November 1--4, 1994
  name:
    name part: Colinge, J. P.
    role:
      role term: creator
  name:
    name part: Lysenko, V. S.
  name:
    name part: Nazarov, A. N.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: ne
    date issued: 1995
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (300 pages)
  abstract: In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.
  note: edited by J.P. Colinge, V.S. Lysenko, A.N. Nazarov.
  note: Electronic resource.
  subject:
    topic: Semiconductors
  subject:
    topic: Silicon-on-insulator technology
  subject:
    topic: Semiconductors
  subject:
    topic: Silicon-on-insulator technology
  classification: TK7871.85
  classification: 621.3815/2
  related item:
    title info:
      title: NATO ASI Series, Series 3: High Technology, ; 4
  identifier: 9789401101097 (electronic bk.)
  identifier: 9401101094 (electronic bk.)
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: I9W
    record creation date: 121227
    record change date: 20260420215545.6
    record identifier: in00003555918
    language of cataloging:
      language term: eng