Physical and Technical Problems of SOI Structures and Devices /
In <em>Physical and Technical Problems of SOI Structures and Devices</em>, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in...
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Dordrecht :
Springer Netherlands : Imprint : Springer,
1995.
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| Series: | NATO ASI Series, Series 3: High Technology, ;
4. |
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | In <em>Physical and Technical Problems of SOI Structures and Devices</em>, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues. <br/> |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (300 pages) |
| ISBN: | 9789401101097 (electronic bk.) 9401101094 (electronic bk.) |