APA (7th ed.) Citation

Chernow, F., Borders, J. A., & Brice, D. K. (1977). Ion Implantation in Semiconductors 1976. Springer US.

Chicago Style (17th ed.) Citation

Chernow, Fred, James A. Borders, and David K. Brice. Ion Implantation in Semiconductors 1976. Boston, MA: Springer US, 1977.

MLA (9th ed.) Citation

Chernow, Fred, et al. Ion Implantation in Semiconductors 1976. Springer US, 1977.